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Wafer Probecards

High strength and damage tolerance

Thin sheets of silicon nitride are particularly suitable for the contact surfaces of wafer carriers and suction plates used for polishing, masking, etching, structuring, and coating wafers. Due to the high strength and damage tolerance, it is also possible to produce particularly thin components and to provide them individually with laser drilled holes or surface structures. This results in "wafer probecards", which enable the final inspection of microchips and fully assembled boards.


Special advantages of silicon nitride

  • High chemical purity, similar composition
  • High abrasion resistance / protection against cross-contamination
  • Good temper ability or thermal conductivity
  • High electrical resistance (1014 Ωcm)
  • Can be individually laser drilled and structured
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