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Silicon nitride SN-TC (High thermal conductivity Si3N4)

Increased thermal conductivity while maintaining advantageous material mechanics, damage tolerance and density

The special Silicon nitride variant "SN-TC" is characterized by an increased thermal conductivity compared to Silicon nitride SN-GP. Through chemical modifications, thermal conductivity values between 50 and 65 W/mK are achieved (compare SN-GP: 20 - 25 W/mK). In the material design, explicit attention was given to maintaining advantageous material mechanics, damage tolerance and density of gas-pressure sintered Silicon nitride. This material variant is of interest, for example, in wafer carriers or probe cards that can be kept under stable temperature control, optical mirrors or optical bench components subjected to alternating thermal loads.

 

temperatur
1500 °C
temperaturwechsel
ja
saeurebestaendig
ja
lichtdurchlaessigkeit
keine
biegefestigkeit
1020 MPa
druckfestigkeit
3000 MPa
dichte =
3.4
elastizitaetsmodul
310
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